Sulfur Hexafluoride for sale – SF6 – Quality & Service

APPLICATIONS OF SULFUR HEXAFLUORIDE

While technical grade Sulfur Hexafluoride is mainly used as insulator in high-voltage circuits, high purity SF6 is utilized in two main plasma treatment processes in the semiconductor industry: SF6 plasma etch of wafers and SF6 plasma cleaning of vacuum chambers. The high Fluorine fraction per molecule (see the Sulfur Hexafluoride formula, SF6) is exploited in different SF6 etch processes, such as plasma etching or Deep Reactive Ion Etching (DRIE) processes. Similar to the SF6 etching, Sulfur Hexafluoride serves as an effective molecule in the cleaning process of the vacuum chambers via SF6 plasma. Below the most prevalent examples for such an SF6 plasma treatment are depicted.

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